High Vacuum Equipment

・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa
・For 450 mm wafer gate valve
・Top accessible
・Aluminum bodied
 Uniform baking temperature
・Strong against fluorine
・Minimal gas emissions
・One-touch connection and release (no tool)
・A precision casting, unified composition prevents accumulation of gas.
・Minimum operating pressure: 1×10-6Pa(abs)
・With the valve and needle valve all in one unit, takes up 1/4 the space of
・Suitable for use as a block disk between the load lock chamber and
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