vacuum equipments

For 300 mm wafer Parallel Seal Type Slit Valve / XGTP


Long service life: 3 million cycles (within standard temperature range)
Low particle generation: Reduced by 1/5 or more
 (compared with the current product)
Easier maintenance
 Easy replacement of bellows
 Gate can be replaced from above.(Made to order)
Safety measures
 A mechanical end lock mechanism has been adopted.