Reduction of the power consumption by using a DC inverter refrigerator and inverter pump.
Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
Compliant with various safety standards
Compliant with UL Standards, SEMI Standards, CE-marking
Type of circulating fluid: Fluorinated fluids, Ethylene glycol aqueous solution, Tap water, Deionized water
Temperature range setting: –20 to 40°C/20 to 90°C/–20 to 90°C
Cooling Capacity: 1 kW, 2 kW, 4 kW, 8 kW, 10 kW to Max.15 kW
Temperature stability: ±0.1°C
Refrigerant: R404A (HFC)/R134a (HFC)