Clean Air Module LLB

-+
・Clean equipment modularized (Reduction of piping labor/Space-saving)
 Clean air is easily available.
・Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%)
・Wetted parts: Grease-free, Silicone-free
・Assembled in a clean room, shipped and packed in a duplicate package
・24 combinations available

Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1

Series Fluid Set pressure Flow range L/min (ANR)
LLB3 Clean air
N2 gas Note)
0.05 to 0.4MPa 5 to 100
LLB4 Clean air
N2 gas Note)
0.05 to 0.4MPa 50 to 500