SMC Clean Exhaust Filter SFE

Clean Exhaust Filter SFE

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・This filter enables direct exhaust of air in a clean room!
 (Cleanliness class 4*: ISO14644-1)
・Air can be directly exhausted in a clean room only by mounting
 this product to the pneumatic equipment in the clean room.
・No need for piping for exhaust air and relief air. Reduces piping
 installation work and space.
・Noise reduction : 30 dB (A) or more
・One-touch fitting type added.
Series Nominal filtration rating (μm) Maximum flow capacity L/min (ANR) Port size
SFE 0.01 (Collection efficiency: 99.99%) 3,30,65,130,200 M5×0.8,R1/8,R1/4
φ4,φ6,φ8,φ10