Clean Gas Filter SF

-+
・Cartridge type allows element replacement.
 (SFA100/200/300,SFB100)
・Compact disposable type for semiconductor industry
 (SFB300,SFC100)
Type Series Operating pressure Filtration
Cartridge type
Disc
SFA100/200/300 Max.0.99MPa
(Vacuum:1.3×10-6kPa)
0.01μm
(Filtration efficiency
99.99%)
Cartridge type
Straight
SFB100 Max.0.99MPa
(Vacuum:1.3×10-6kPa)
0.01μm
(Filtration efficiency
99.99%)
Disposable type
Straight
SFB300 Max.0.99MPa
(Vacuum:1.3×10-6kPa)
0.01μm
(Filtration efficiency
99.99%)
Disposable type
Multiple disc
SFC100 Max.0.99MPa
(Vacuum:1.3×10-6kPa)
0.01μm
(Filtration efficiency
99.99%)