Diaphragm Valve for Ultra High Purity AP

Diaphragm Valve for Ultra High Purity AP

-+
・For UHP gas delivery in semiconductor and other clean industries.
・Used as gas shutoff valve.
・No spring is used for the wetted parts and drive part is also separated
 from the diaphragm. Dead space in the flow path is small to suppress
 the particle generation.
 
 
 
Series Type Body material Connection type Connection size
AP Air operated 316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
1/2'',3/4''
AP Manual 316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''