Refrigerated Thermo Chillers

Energy Saving Thermo Chiller - HRZ Series


Reduction of the power consumption by using a DC inverter refrigerator and inverter pump.

  • Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
  • Compliant with various safety standards
  • Compliant with UL Standards, SEMI Standards, CE-marking

Type of circulating fluid:  Fluorinated fluids, Ethylene glycol aqueous solution, Tap water, Deionized water

Temperature range setting:  –20 to 40°C/20 to 90°C/–20 to 90°C

Cooling Capacity:  1 kW, 2 kW, 4 kW, 8 kW, 10 kW to Max.15 kW

Temperature stability:  ±0.1°C

Refrigerant: R404A (HFC)/R134a (HFC)