Normal CloseHigh Vacuum Solenoid Valve XSA.png

Normally Close High Vacuum Solenoid Valve XSA

-+
・Minimum operating pressure: 1×10-6Pa(abs)
・Leakage: Internal 1.3×10-9Pa・m3/s, 
 External 1.3×10-11Pa・m3/s
・2 types of fitting
・Power consumption: Max.25% reduction
・Weight: Max.18% lighter 0.5kg→0.41kg
Series Valve type Fluid Piping Port size
XSA Normal Close Air
Inert gas
Face seal fitting
Compression fitting
1/4, 3/8
XSA Normal Close Air
Inert gas
Female thread
(Rc, NPT)
1/8, 1/4, 3/8