Chilllers (Circulating Fluid Temperature Controller)

Thermo-chiller/Standard Type (Air-cooled refrigeration) HRS400 Series Cooling capacity: 38 kW Power supply: 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480 VAC (60 Hz) Set temperature range: 5 to 35°C Max. ambient temperature: 45°C Temperature stability: ±0.1°C With heating function Immersion pump (Mechanical sealless) Waterproof specification: IPX4 Touch panel, Improved usability, and visibility

Thermo-chiller Compact Dual/Basic Type for Lasers HRLE With functions narrowed down, 2 independent temperature control systems have been achieved with only a single compressor, a single pump, and a single tank. Space saving: Footprint reduced by 21% Energy saving: Power consumption reduced by 17% Protection of the electrical unit: IPX4

Circulating Fluid Temperature Controller EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F Series More effective energy-saving is achieved through the use of a DC inverter compressor and an inverter pump. Energy saving The inverter controls the number of motor rotations of the compressor and pumps according to the load from the user’s application. Power consumption: Max. 65% reduction Facility water: Max. 67% reduction High performance. Temperature stability: ±0.1°C (When a load is stable). Cooling time: Max. 46% reduction (SMC comparison) Refrigerant: R410A (HFC)/R448A (HFC/HFO)

Thermo-chiller/Rack Mount Type HRR A 1.1 kW (60 Hz) cooling capacity option and an inverter specification mechanical sealless pump option have been added. [New] Operable without the need to remove the unit from the rack Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel Space-saving: Multiple chillers can be mounted to a 19-inch rack. Cooling capacity: 1.1/1.2/1.8/2.4/3.0 kW (60 Hz) Temperature stability: ±0.1℃

Circulating Fluid Temperature Controller Thermo-chiller/Rack Mount Type HRR Series Operable without the need to remove the unit from the rack Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel Space saving: Multiple chillers can be mounted to a 19-inch rack. Cooling capacity: 1.2/1.8/2.4/3.0 kW (60 Hz) Temperature stability: ±0.1℃ Global power supply:　Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz),　Single-phase 200 to 230 VAC (50/60 Hz) Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRR 10 to 35℃ 1.2 kW 1.8 kW 2.4 kW 3.0 kW ±0.1℃ Air-cooled refrigeration Water-cooled refrigeration Tap water Ethylene glycol aqueous solution (15%)

Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Temperatures for 2 fluid channel systems can be controlled individually by one chiller. Space saving, Reduced wiring Footprint 22% reduction One power supply system for 2 channels Energy saving - power consumption reduced by 30%

Resistant to dusty or water splashing environment Protection of the electrical unit: IP54 Metal panel - Entire exterior surface is metal.Stainless steel panel can be selected. (Option) Large capacity tank (12 L) Ambient temperature: 5 to 45°C Other Data Safety Instructions Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRS-R 5 to 40℃; 1.9 kW, 2.9 kW (60 Hz) ±0.1℃ Air-cooled refrigeration Tap water Ethylene glycol aqueous solution (15%)

With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation. For a wide range of applications, such as laser machine tools, analytical equipment, LCD manufacturing equipment, mold temperature control, etc. Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024) Timer function, Low liquid level protection, Power failure auto-restart, Anti-freezing function, etc. Self diagnosis function Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC) Compliant with UL Standards, CE-marking The cooling capacity(W) 4200 W  Lightweight/Compact Temperature stability±0.1℃ Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRS012 to 060 5 to 40℃ 1.3kW 1.9kW 2.4kW 3.2kW 4.2kW 5.1kW 5.9kW （60Hz） ±0.1℃ Air-cooled refrigeration/Water-cooled refrigeration Tap water Deionized water Ethylene glycol aqueous solution （15％）

Operable without the need to remove the unit from the rack Front Access: Simple to control, service and maintain with all filters and drainage via the front panel Space Saving: Multiple chillers can be mounted to a 19-inch rack. Cooling capacity: 1.2/1.8/2.4/3.0 kW (60 Hz) Temperature stability: ±0.1ºC Global power supply: Single-phase 200 to 230 VAC (50/60 Hz) Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRR 10 to 35℃ 1.2 kW 1.8 kW 2.4 kW 3.0 kW Air-cooled refrigeration Water-cooled refrigeration Tap water Ethylene glycol aqueous solution (15%)

For applications requiring high-precision temperature control High-precision, refrigerant-free temperature control equipment employing Peltier elements Simple structure and high reliability Can easily be built into equipments with compact and low-vibration design Compatible with wide range of power supply voltages Conforms to UL specifications, CE marking

・High-performance Type * Direct heat exchanger for water circulated within a plant ・For temperature regulation within the temperature range 　where no freezer is needed ・Proven performance with semiconductor process equipment, 　with a wide range of features such as high temperature stability, 　wide temperature range, failure testing, external signal. ・Conforms to UL and SEMI specifications, CE marking. ・Possible to select the inverter type. Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRW 20 to 90℃ 2 kW, 8 kW, 15 kW, 30 kW ±0.3℃ Water-cooled type (Without compressor) Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%)

・High-performance Inverter Type.* Temperature for two systems can be controlled separately by one chiller.・Double inverter type: Substantially more energy is saved by using a　DC inverter refrigerator and inverter pump.・Space saving: Footprint reduced by 23%・Reduced wiring, piping and labor: Single power cable, Single facility-water　piping system・CESeriesSet temperaturerangeCoolingcapacityTemperaturestabilityCoolingmethodCirculating liquidHRZD−30 to 90℃9.5 kW x 2±0.1℃Water-cooledrefrigerationFluorinated liquid,Ethylene glycol aqueous solution (60%)

・High-performance Inverter Type * Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal. ・All models conform to safety standards. ・Conforms to UL and SEMI specifications, CE marking. Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRZ -20 to 40 20 to 90 -20 to 90 1 kW, 2 kW, 4 kW, 8 kW ±0.1℃ Water-cooled refrigeration Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%)

・High-performance Type. - Proven performance with semiconductor process equipment, with a wide 　range of features such as high temperature stability, wide temperature range, failure testing, external signal. ・All models conform to safety standards. ・Conforms to UL and SEMI specifications, CE marking. Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRZ -20 to 40 20 to 90 -20 to 90 1 kW, 2 kW, 4 kW, 8 kW ±0.1℃ Water-cooled refrigeration Fluorinated liquid, Tap water, Deionized water, Ethylene glycol aqueous solution (60%)

・Large energy saving by triple control! ・Power consumption: 33% Energy saving ・Compact/Lightweight 32 kg (100 VAC) ・Maintenance free: Magnet pump ・Low-noise design: 55dB (A) Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRSE 10 to 30℃ 1.2 kW 1.6 kW 2.2 kW (60 Hz) ±2.0℃ Air-cooled refrigeration Tap water Ethylene glycol aqueous solution (15%)

・Outstanding energy saving effect with triple inverter ! ・Outdoor installation, Splashproof type (IPX4) ・Maximum ambient temperature 45℃ ・Temperature stability ±0.1℃ (with stabilized load) ・Compact and space-saving ・Space-saving and lightweight 280 kg (25 kW type) ・Conforming to CE/UL Standards Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRSH 5 to 35℃ 10 kW 15 kW 20 kW 25 kW 28 kW ±0.1℃ Air-cooled refrigeration Water-cooled refrigeration Tap water, Deionized water, Ethylene glycol aqueous solution (15%)

・Air-cooled models provide cooling water wherever needed 　thanks to easy mounting and easy operation. ・Proven performance with a wide range of applications such as lasers/ 　analysis equipment/LCD manufacturing equipment/mold temperature 　regulators, etc. ・Compact W377 x H615 x D500 mm, 40 kg ・Timer operation function, Power failure auto-restart function, 　Low level in tank detecting function, Anti-freezing function ・Self diagnosis function ・Ideal for overseas models 　(single-phase 200 to 230 VAC, single-phase 100 and 115 VAC) ・Conforms to UL specifications, CE marking. Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating liquid HRS012 to 060 5 to 40℃ 1.3kW 1.9kW 2.4kW 3.2kW 5.1kW 5.9kW （60Hz） ±0.1℃ Air-cooled refrigeration/ Water-cooled refrigeration Tap water Deionized water Ethylene glycol aqueous solution （15％）