* Direct heat exchanger for water circulated within a plant
・For temperature regulation within the temperature range
where no freezer is needed
・Proven performance with semiconductor process equipment,
with a wide range of features such as high temperature stability,
wide temperature range, failure testing, external signal.
・Conforms to UL and SEMI specifications, CE marking.
・Possible to select the inverter type.
20 to 90℃
2 kW, 8 kW, 15 kW, 30 kW
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)