Diaphragm Valve

・Cleanroom assembled and He leaked tested. ・Valve meets dimensional requirements of SEMI F36-0299, Option I. ・User-friendly forged body. Series Type Body material Connection type Connection size AZ Air operated 316L SS Face seal Tube weld 1/4'' 3/8'' 1/2 AZ Manual 316L SS Face seal Tube weld 1/4'' 3/8'' 1/2

・Rc, R and NPT connections are added to series. ・For wide variety of applications from semiconductor to general. ・Cleaned for O2 service ・Compact and lightweight by making the actuator shorter (AK3542/4542) ・M5 actuation port (AK3542/4542) ・Compact and lightweight by modifying the knob design (AK3652/4652) ・The knob is a unique design that combines a scalloped round knob with a raised 　rectangular section to provide two choices of gripping.(AK3652/4652) Series Type Body material Connection type Connection size AK Air operated 316 SS Compression Rc, R, NPT 1/4''，3/8'' AK Manual 316 SS Compression Rc, R, NPT 1/4''，3/8''

・For UHP gas delivery in semiconductor and other clean industries. ・Used as gas shutoff valve. ・No spring is used for the wetted parts and drive part is also separated 　from the diaphragm. Dead space in the flow path is small to suppress 　the particle generation.       Series Type Body material Connection type Connection size AP Air operated 316L SS secondary remelt Face seal Tube weld 1/4''，3/8'' 1/2''，3/4'' AP Manual 316L SS secondary remelt Face seal Tube weld 1/4'', 3/8'' 1/2'', 3/4''