Regulators for Ultra High Purity

・For UHP gas delivery in semiconductor and other clean industries.・Body material: 316L SS secondary remelt or 316L SS・Electropolished wetted parts・Metal seal to atmosphereSeriesActuationApplicationBody materialConnection typeConnection sizeAP/SLSingle stageDistribution (Compact)316L SSsecondary remeltFace sealTube weld1/4'', 3/8''AP/SLSingle stageDistribution316L SSsecondary remeltFace sealTube weld1/4'', 3/8''1/2'', 3/4''AP/SLSingle stageBulk gas316L SSFace sealTube weld1/2'', 3/4'', 1''AP/SLSingle stageSource316L SSsecondary remeltFace sealTube weld1/4'', 3/8''1/2'', 3/4''AP/SLSingle stageSub-atmospheric pressure316L SSsecondary remeltFace sealTube weld1/4'', 3/8''1/2'', 3/4''APTwo stageSource316L SSsecondary remeltFace sealTube weld1/4''，3/8''AZSingle stageDistribution316L SSFace sealTube weld1/4'', 3/8''1/2''AZSingle stageSource316L SSFace sealTube weld1/4'', 3/8''1/2''AZSingle stageSub-atmospheric pressure316L SSFace sealTube weld1/4'', 3/8''1/2''

・For wide variety of applications from semiconductor to general. ・Body material 316 SS or brass available depending on gas. Series Actuation Application Body material Connection type Connection size AK Single stage Distribution 316 SS or Brass NPT female, Compression 1/4'', 3/8'' 1/2'' AK Single stage Source 316 SS or Brass NPT female, Compression 1/4'', 3/8'' 1/2'' AK Single stage Sub-atmospheric pressure 316 SS or Brass NPT female, Compression 1/4'', 3/8'' 1/2'' AK Two stage Source 316 SS or Brass NPT female, Compression 1/4'' BP Back pressure regulator ― 316 SS or Brass NPT female, Compression 1/4''