Refrigerated Thermo-chiller HRZ (High-performance Type)

Refrigerated Thermo-chiller HRZ (High-performance Type)

-+
・High-performance Type.
- Proven performance with semiconductor process equipment, with a wide
 range of features such as high temperature stability, wide temperature range, failure testing, external signal.
・All models conform to safety standards.
・Conforms to UL and SEMI specifications, CE marking.
Series Set temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZ -20 to 40
20 to 90
-20 to 90
1 kW, 2 kW, 4 kW, 8 kW ±0.1℃ Water-cooled
refrigeration
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)