Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

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・For UHP gas delivery in semiconductor and other clean industries.
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・Metal seal to atmosphere
Series Actuation Application Body material Connection type Connection size
AP/SL Single stage Distribution (Compact) 316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
AP/SL Single stage Distribution 316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Bulk gas 316L SS Face seal
Tube weld
1/2'', 3/4'', 1''
AP/SL Single stage Source 316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Sub-atmospheric pressure 316L SS
secondary remelt
Face seal
Tube weld
1/4'', 3/8''
1/2'', 3/4''
AP Two stage Source 316L SS
secondary remelt
Face seal
Tube weld
1/4'',3/8''
AZ Single stage Distribution 316L SS Face seal
Tube weld
1/4'', 3/8''
1/2''
AZ Single stage Source 316L SS Face seal
Tube weld
1/4'', 3/8''
1/2''
AZ Single stage Sub-atmospheric pressure 316L SS Face seal
Tube weld
1/4'', 3/8''
1/2''