Slit Valve XGT

-+
・Suitable for use as a block disk between the load lock chamber and
 transfer chamber, or the transfer chamber and process chamber, of
 semiconductor equipment
Series Operating pressure
range (Pa)
Fluid Gate size
(Height x Width)
(mm)
Operating
pressure
(MPa)
XGT Atmospheric pressure
to 1 x 10-6
Inert gas type vacuum 32 x 222
46 x 236
50 x 336
0.45 to 0.6