Slit Valve/Door Valve XGT/XGD

-+
・For 450 mm wafer gate valve
・Top accessible
・Replaceable bellows
・Adopted a two-stage operating structure
・With end lock mechanism
Series Operating pressure
range (Pa)
Fluid Gate size
(Height x Width)
(mm)
Operating
pressure
(MPa)
XGT/Slit Valve Atmospheric pressure to 1×10-6 Inert gas 56X496 0.45 to 0.6
XGD/Door Valve Atmospheric pressure to 1×10-6 Inert gas 56X496 0.4 to 0.6