Vacuum angle valve

Vacuum Angle Valve with Release Valve XLJ Series
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  • Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
  • Reduced piping labor due to the built-in release valve structure
Other Data
Series Actuation Valve type Shaft seal system Output
XLJ Electromagnetic  Normally closed / Vacuum pilot O-ring seal 25, 40