Reduction of the power consumption by using a DC inverter refrigerator and inverter pump.

• Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
• Compliant with various safety standards
• Compliant with UL Standards, SEMI Standards, CE-marking

Type of circulating fluid:  Fluorinated fluids, Ethylene glycol aqueous solution, Tap water, Deionized water