Regulators for Ultra High Purity

・For wide variety of applications from semiconductor to general. ・Body material 316 SS or brass available depending on gas.

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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

・For UHP gas delivery in semiconductor and other clean industries.
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・Metal seal to atmosphere
Series Actuation Application Body material Connection type Connection size
AP/SL

Back Pressure Regulator AK/BP

Back Pressure Regulator AK/BP

・For wide variety of applications from semiconductor to general.
・Body material 316 SS or brass available depending on gas.
Series Actuation Application Body material Connection type Connection size
AK Single stage Distribution 316 SS
or Brass
NPT female, Compression 1/4'', 3/8''
1/2''